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Chemical Vapor Deposition Polymerization - 9781402076886

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Item specifics

Condition
Brand New: A new, unread, unused book in perfect condition with no missing or damaged pages. See the ...
Book Title
Chemical Vapor Deposition Polymerization
ISBN
9781402076886
Subject Area
Chemical Engineering
Publication Name
Chemical Vapor Deposition Polymerization: the Growth and Properties of Parylene Thin Films
Publisher
Springer-Verlag New York Inc.
Subject
Engineering & Technology, Physics
Publication Year
2003
Type
Textbook
Format
Hardcover
Language
English
Item Height
235mm
Author
Jeffrey B. Fortin, Toh-Ming Lu
Item Width
155mm
Item Weight
780g
Number of Pages
102 Pages

About this product

Product Information

The interest and research in the parylene family polymers has remained strong since their invention in 1947. There have been a handful of reviews and encyclopedia articles covering parylene and its properties, but no textbook has been devoted to the subject up to 2003. The authors are attempting to fill the void with this textbook. It provides a solid introduction to the parylene family polymers, their deposition apparatus and their film properties. The text is intended to be valuable to both users and researchers of parylene thin films. It should be particularly useful for those setting up and characterizing their first research deposition system. It provides a good picture of the deposition process and equipment, as well as information on system-to-system variations that is important to consider when designing a deposition system or making modifications to an existing one. Also included are methods to characterize a deposition system's pumping properties as well as monitor the deposition process via mass spectrometry. There are many references that should lead the reader to further information on the topic being discussed. This text should serve as a useful reference source and handbook for scientists and engineers interested in depositing high quality parylene thin films.

Product Identifiers

Publisher
Springer-Verlag New York Inc.
ISBN-13
9781402076886
eBay Product ID (ePID)
87869054

Product Key Features

Subject Area
Chemical Engineering
Author
Jeffrey B. Fortin, Toh-Ming Lu
Publication Name
Chemical Vapor Deposition Polymerization: the Growth and Properties of Parylene Thin Films
Format
Hardcover
Language
English
Subject
Engineering & Technology, Physics
Publication Year
2003
Type
Textbook
Number of Pages
102 Pages

Dimensions

Item Height
235mm
Item Width
155mm
Item Weight
780g

Additional Product Features

Title_Author
Jeffrey B. Fortin, Toh-Ming Lu
Country/Region of Manufacture
United States

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