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Picture 1 of 1
Sub-Half-Micro
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Located in: Fairfield, Ohio, United States
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Estimated between Sat, May 18 and Thu, May 30 to 43230
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eBay item number:364769721711
Item specifics
- Condition
- ISBN-13
- 9780521022347
- Book Title
- Sub-Half-Micron Lithography for ULSIs
- ISBN
- 9780521022347
- Publication Year
- 2005
- Type
- Textbook
- Format
- Trade Paperback
- Language
- English
- Publication Name
- Sub-Half-Micron Lithography for Ulsis
- Item Height
- 0.7in
- Item Length
- 9.6in
- Publisher
- Cambridge University Press
- Item Width
- 7in
- Item Weight
- 21.8 Oz
- Number of Pages
- 344 Pages
About this product
Product Information
In semiconductor-device fabrication processes, lithography technology is used to print circuit patterns on semiconductor wafers. The remarkable miniaturization of semiconductor devices has been made possible only because of the continuous progress in lithography technology. However, for the trend of ever-increasing miniaturization to continue, a breakthrough in lithography technology is now needed. This book describes advanced techniques under development that represent the key to future semiconductor-device fabrication.
Product Identifiers
Publisher
Cambridge University Press
ISBN-10
0521022347
ISBN-13
9780521022347
eBay Product ID (ePID)
48671792
Product Key Features
Publication Name
Sub-Half-Micron Lithography for Ulsis
Format
Trade Paperback
Language
English
Publication Year
2005
Type
Textbook
Number of Pages
344 Pages
Dimensions
Item Length
9.6in
Item Height
0.7in
Item Width
7in
Item Weight
21.8 Oz
Additional Product Features
Lc Classification Number
Tk7874.76 .S83 2000
Table of Content
1. Introduction Masao Fukuma; 2. Optical lithography Kunihiko Kasama, Shinji Okazaki, Hisatake Sano and Wataru Wakamiya; 3. X-ray lithography Kimiyoshi Deguchi, Teruo Hosokawa, Sunao Ishihara and Katsumi Suzuki; 4. Electron beam lithography Takayuki Abe, Koichi Moriizumi, Yukinori Ochiai, Norio Saitou, Tadahiro Takigawa and Akio Yamada; 5. Ion beam lithography Masanori Komuro and Shinj Matsui; 6. Resists Hiroshi Ban, Tadayoshi Kokubo, Makoto Nakase and Takeshi Ohfuji; 7. Metrology, defect inspection and repair Tadahito Matsuda, Toru Tojo and Seiichi Yabumoto; Index.
Copyright Date
2005
Target Audience
Scholarly & Professional
Topic
Electronics / Circuits / Vlsi & Ulsi, Electronics / Circuits / General, Electronics / Optoelectronics, Industrial Technology
Dewey Decimal
621.39/5
Dewey Edition
21
Illustrated
Yes
Genre
Technology & Engineering
Item description from the seller
Seller assumes all responsibility for this listing.
eBay item number:364769721711
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Item location:
Fairfield, Ohio, United States
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| Shipping and handling | Each additional item | To | Service | Delivery*See Delivery notes |
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| Free shipping | Free | United States | Economy Shipping | Estimated between Sat, May 18 and Thu, May 30 to 43230 |
| Handling time |
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| Will ship within 10 business days of receiving cleared payment. The seller has specified an extended handling time for this item. |
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Seller feedback (1,022,022)
i***6 (139)- Feedback left by buyer.
Past 6 months
Verified purchase
Item as described, good price, well packaged, arrived slightly later than hoped (not in time for Christmas ) but the order was placed in a very busy shipping period. No issue with the seller’s speed of response and sending the item. Great seller!
t***r (91)- Feedback left by buyer.
Past 6 months
Verified purchase
I was pleasantly surprised by how soon I received this textbook given that it shipped from outside the U.S. It was packaged well with no damage. The price was right. And I greatly appreciated the communication informing me where the book was shipping from and including a tracking number. Overall, a positive experience, - online shopping the way it should be. I've bought books from this seller several times now without any complaints and will surely buy from them again. Thanks a lot!
s***3 (147)- Feedback left by buyer.
Past month
Verified purchase
Quality and hard to find book that won't be released 'til January 2025 in the U.S.A.
Fantastic price.
Book was in a secure and protective package. Arrived a few days after I placed order and that was faster than I expected.
Seller is a fantastic communicator and proactive in regards to tracking status. I'd definitely buy from them in the future.
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